S, V.; A, S.; SURESH, H.; S, A.; P, S.; MJ, N. Simulation and analysis of suspension based single axis mems capacitive accelerometer. International Journal of Basic and Applied Science, [S. l.], v. 11, n. 3, p. 107–116, 2022. DOI: 10.35335/ijobas.v11i3.119. Disponível em: https://www.ijobas.pelnus.ac.id/index.php/ijobas/article/view/119. Acesso em: 16 apr. 2026.